Capacitive displacement sensors PI D-015 through D-100 offer resolutions of less than 0.1 nm, 0.05% linearity, and long-term electronic stability of 0.1 nm/3 hours. The devices can be ordered made from either aluminum or the temperature-invariant Invar. Displacement lengths range from 15 to 100 µm.
Diffractive optical elements simplify scanning systems