Wafer positioning system provides nanometer displacement measurement

Sept. 27, 2022
The WP-Z-120A wafer positioning system is used for wafer inspection with an optical microscope.

The WP-Z-120A wafer positioning system is used for wafer inspection with an optical microscope. It holds 300 mm wafers with loads up to 8 kg. It uses capacitive positioning sensors to provide nanometer displacement measurement and closed-loop feedback. Flexure guidance offers friction-free motion over a 120 µm closed-loop range.

Prior Scientific

Rockland, MA

www.nanopositioning.com

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