Wafer positioning system provides nanometer displacement measurement
The WP-Z-120A wafer positioning system is used for wafer inspection with an optical microscope. It holds 300 mm wafers with loads up to 8 kg. It uses capacitive positioning sensors to provide nanometer displacement measurement and closed-loop feedback. Flexure guidance offers friction-free motion over a 120 µm closed-loop range.
Prior Scientific
Rockland, MA