Aerotech positioning stages provide 5 mm of travel

June 20, 2011
The AVS1000 series positioning stages offer 5 nm resolution and accuracy to ±1 μm for large loads up to 135 kg.
Content Dam Etc Medialib New Lib Laser Focus World Online Articles 2011 06 58036

The AVS1000 series positioning stages offer 5 nm resolution and accuracy to ±1 μm for large loads up to 135 kg. It provides 5 mm of travel, with custom designs available. Cleanroom and electrostatic discharge protection are optional. Sealed linear-motion guide bearings with integral wipers provide payload capability, long life, and smooth motion.
Aerotech
Pittsburgh, PA
[email protected]

More Products

-----

PRESS RELEASE

AVS1000 Lift Stage with Large Aperture offers Precise Elevation of Large and Heavy Loads

High-load lift stage with aperture

Submicron closed-loop positioning

Excellent pitch and yaw characteristics over full travel

5 mm travel; custom designs available for alternate travels

Optional cleanroom and ESD protection

Precision-ground ball screw and moving-wedge design for high performance

Aerotech’s AVS1000 series stages offer the ideal solution for applications that require positioning of large or heavy loads over very small incremental movements in elevation above a horizontal plane. The low profile and precise motion capability make these stages ideal for use in semiconductor manufacturing and inspection, automated tool alignment, machine vision inspection systems, laser machining applications, and more.

Quality Design Provides Superior Performance

The AVS1000 series provides precise elevation of a load in a vertical plane using a moving-wedge design. The precision machined wedge block converts horizontal movement from a precision-ground ball screw into vertical elevation of the AVS1000 series tabletop. Excellent pitch and yaw characteristics over the length of travel minimize the impact of angular errors. AVS1000 performance includes exceptional resolution (5 nm) and accuracy (±1 µm), with the ability to apply this performance to large loads up to 135 kg.

Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability, long life, and smooth, precision motion. Stable and parallel vertical motion with no rocking or horizontal deviation of the platform is assured. Careful design of the wedge angle and bearing system allows the AVS1000 series to achieve submicron resolution and still maintain a compact profile.

A Better Approach to Vertical Motion

The vertical lift approach offers an alternative to traditional Z-plane oriented stages. Not only do the AVS1000 series stages offer a lower profile, but the load can also be conveniently accessed from any side due to the large aperture. And by centering the payload over the bearings, there are no cantilevering effects.

Motor and Drives

The AVS1000 series includes Aerotech's high performance NEMA 34 frame-size BMS series brushless, slotless servomotor. The slotless motor has zero cogging and therefore is optimized for applications requiring very smooth motion.

Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.

For further information, please contact Steve McLane at 412-967-6854 (direct), or via e-mail at [email protected].

The AVS1000 series data sheet is available at:
http://www.aerotech.com/products/liftstages/avs1000.html

-----

Follow us on Twitter

Subscribe now to Laser Focus World magazine; it's free!

Sponsored Recommendations

Optical Power Meters for Diverse Applications

April 30, 2024
Bench-top single channel to multichannel power meters, Santec has the power measurement platforms to meet your requirements.

Request a quote: Micro 3D Printed Part or microArch micro-precision 3D printers

April 11, 2024
See the results for yourself! We'll print a benchmark part so that you can assess our quality. Just send us your file and we'll get to work.

Request a Micro 3D Printed Benchmark Part: Send us your file.

April 11, 2024
See the results for yourself! We'll print a benchmark part so that you can assess our quality. Just send us your file and we'll get to work.

Request a free Micro 3D Printed sample part

April 11, 2024
The best way to understand the part quality we can achieve is by seeing it first-hand. Request a free 3D printed high-precision sample part.

Voice your opinion!

To join the conversation, and become an exclusive member of Laser Focus World, create an account today!