Deposition system

March 1, 1997
The SUMO 820 Research System is a compact molecular-beam-epitaxy system designed for use in research facilities. The growth system uses the company`s SUMO effusion cell technology that provides benefits including low background impurities, reduced defect counts, flux uniformity, and low shutter flux transients. The system allows multiple wafer introduction and includes 2-in. sample capability, eight source ports, Molly control software, and both RGA and RHEED systems.

Deposition system

The SUMO 820 Research System is a compact molecular-beam-epitaxy system designed for use in research facilities. The growth system uses the company`s SUMO effusion cell technology that provides benefits including low background impurities, reduced defect counts, flux uniformity, and low shutter flux transients. The system allows multiple wafer introduction and includes 2-in. sample capability, eight source ports, Molly control software, and both RGA and RHEED systems.

EPI MBE Products, Saint Paul, MN

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