Deposition system
Deposition system
The SUMO 820 Research System is a compact molecular-beam-epitaxy system designed for use in research facilities. The growth system uses the company`s SUMO effusion cell technology that provides benefits including low background impurities, reduced defect counts, flux uniformity, and low shutter flux transients. The system allows multiple wafer introduction and includes 2-in. sample capability, eight source ports, Molly control software, and both RGA and RHEED systems.
EPI MBE Products, Saint Paul, MN