Heidenhain motion system can contain up to seven axes
April 24, 2020
The CHARON2 motion system from ETEL for semiconductor manufacturing comes in nine standard configurations with two electronic options each. It can be a standalone x-axis or a system of up to seven axes with the inclusion of the Z3TM module for tip-tilt. It has position accuracy to ±1 µm and acceleration from 10 to 20 m/s2.
Heidenhain
Schaumburg, IL
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