Hexapod provides high-integrity motion with nanometer precision

May 12, 2024
The Hybrid Hexapod system provides 6D motion for applications including optics, semiconductors, manufacturing, metrology, laser processing, and micromachining.

The Hybrid Hexapod system provides 6D motion, integrating a tripod parallel kinematics structure for Z-plane and tip/tilt motion with a monolithic serial kinematic structure for XY motion and a rotary stage for continuous 360° yaw rotation, providing high-integrity motion with nanometer precision. Applications include optics, semiconductors, manufacturing, metrology, laser processing, and micromachining.

ALIO Industries

Arvada, CO


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LFW Staff

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