Hexapod provides high-integrity motion with nanometer precision
The Hybrid Hexapod system provides 6D motion, integrating a tripod parallel kinematics structure for Z-plane and tip/tilt motion with a monolithic serial kinematic structure for XY motion and a rotary stage for continuous 360° yaw rotation, providing high-integrity motion with nanometer precision. Applications include optics, semiconductors, manufacturing, metrology, laser processing, and micromachining.
ALIO Industries
Arvada, CO