RotoRing300 direct drive rotary tables provide superior angular positioning for front- and back-end semiconductor manufacturing equipment using latest generation 300 mm wafers...
Overhead XY gantries are built with precision ball screw actuators and are available in travel lengths from 100 to 600 mm and speed up to 100 mm/sec. with resolution of 5 µm.
The ACR-335UT direct drive rotary table adapts linear motor technology, coupled with precision bearings, to provide accurate handling of 300 mm semiconductor wafers.