Precision rotation stage accommodates large-diameter silicon wafers

March 11, 2021
The ACR-490UT precision rotation stage has an open center aperture of 490 mm and a height of 22 mm.

The ACR-490UT precision rotation stage has an open center aperture of 490 mm and a height of 22 mm to accommodate large-diameter silicon wafers for semiconductor processing. Featuring direct drive (DDR) technology, it has a resolution of 0.2 arc-sec, repeatability of 0.5 arc-sec, and a maximum speed of 300 rpm.

Intellidrives

Philadelphia, PA

intellidrives.com

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