Precision rotation stage accommodates large-diameter silicon wafers
The ACR-490UT precision rotation stage has an open center aperture of 490 mm and a height of 22 mm to accommodate large-diameter silicon wafers for semiconductor processing. Featuring direct drive (DDR) technology, it has a resolution of 0.2 arc-sec, repeatability of 0.5 arc-sec, and a maximum speed of 300 rpm.
Intellidrives
Philadelphia, PA