Polytec introduces integrated probe head microscope

Tustin, CA--Polytec has introduced a fully integrated, probe head microscope, the MSA-400 Micro System Analyzer that can completely measure and display microstructure motions, simplifying identification of microstructural resonances in all three dimensions. The combination tool is designed to quickly characterize broadband out-of-plane vibrations with Laser Doppler Vibrometry (max. 20 MHz, sub-pm resolution) and in-plane displacements with stroboscopic video microscopy (max. 2 MHz, nm resolution). An optional second laser is available for measuring differential out-of-plane vibrations between scanned and fixed locations.

The MSA-400 refines MEMS analysis and development. Engineering productivity is increased by faster measurements and superior performance over stroboscopic video-only solutions. The Micro System Analyzer rapidly detects out-of-plane and in-plane resonances using proprietary, highly sensitive laser-Doppler techniques. Besides steady state motions, the MSA-400 can measure transient processes utilizing wide-band (pulsed) excitation. Once the resonant frequency is identified, the stroboscopic video microscopy technique can obtain accurate amplitude and phase information surrounding the resonance and display the results in a Bode plot.