Open-center XYZ stage enables dual-sided processing

An application for the ThruSight-Focus open-center XYZ stage includes backside wafer processing.
Aug. 31, 2025

The ThruSight-Focus open-center XYZ stage pairs with the company’s monolithic open-center XY stage with a Z-wedge mechanism that converts horizontal drive force into vertical motion via direct drive. With laser access from below, it enables dual-sided processing and simplified packaging of complex optical or electronic systems. Applications include backside wafer processing, microlens alignment, and silicon photonic integration.

ALIO Industries

Arvada, CO

www.alioindustries.com

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