• MKS Newport XY hybrid stages: Booth #927

    Jan. 24, 2025

    The HybrYX single-plane, air-bearing XY hybrid stages have use in semiconductor wafer inspection systems, as well as large-substrate inspection and processing tools. The stages offer a large (>1 m) XY travel range, scanning velocities up to 600 mm/s, and 0.6G acceleration.

    MKS Newport

    Irvine, CA

    Booth #927

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