MKS Newport XY hybrid stages: Booth #927
The HybrYX single-plane, air-bearing XY hybrid stages have use in semiconductor wafer inspection systems, as well as large-substrate inspection and processing tools. The stages offer a large (>1 m) XY travel range, scanning velocities up to 600 mm/s, and 0.6G acceleration.
MKS Newport
Irvine, CA
Booth #927