Maskless lithography system is compatible with most microelectronic photoresists
The Smart Print-UV (SP-UV) maskless lithography system is equipped with a 385 nm UV LED light source. It is compatible with the most commonly used microelectronic photoresists, including SU-8, used for microfluidics applications. Working distances up to 3 cm allow for non-standard substrates, including curved, flexible, or thick, such as optical lenses.
Microlight3D
Grenoble, France