Physik Instrumente low-profile rotary table suits optical instrumentation

Sept. 14, 2011
A higher-precision version of the M-660 low-profile rotary table can accelerate to velocities of 720 degrees/sec.

A higher-precision version of the M-660 low-profile rotary table can accelerate to velocities of 720 degrees/sec. and its directly coupled precision optical encoder resolves positions down to 4 µrad (0.00023°), providing phase lag- and backlash-free feedback to the servo controller. With a profile of 14 mm, the table is designed for semiconductor/test equipment metrology and optical instrumentation.
Physik Instrumente (PI)
Auburn, MA

www.pi-usa.us

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PRESS RELEASE

Piezo Motor enables Lower Profile Rotation Table with High Resolution

Auburn, MA, PI (Physik Instrumente) L.P. – a leading manufacturer of precision motion control systems — has released a higher-precision version of its M-660 low profile rotary table.

8X Higher Resolution, Same Low Profile
Driven by piezo motors which enable the very low profile of only 14 mm (0.6in), the new model is equipped with a high accuracy direct measuring encoder and provides 8 times the position resolution of the existing version.

Self-Clamping Ceramic Motor, Direct Drive, Direct Encoder, High Speed
The M-660 rotary table can accelerate to velocities of 720 degrees/sec. and its directly coupled precision optical encoder resolves positions down to 4 µrad (0.00023°), providing phase-lag-free, backlash-free feedback to the servo controller. Its self-clamping ceramic drive provides very high stability, with no energy consumption at rest and no heat generation.

Applications: Semiconductor/ Test Equipment, Metrology, Optical Instrumentation

Features & Advantages
Very Low Profile for Easy Integration: Only 14 mm (0.6”)
Backlash-Free Direct Drive and Direct Metrology Optical Encoder
4 µrad Resolution (0.00023°)
Max. Velocity 720 °/s, Unlimited Travel Range
Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
PILine® Motor Principle is Non-Magnetic & Vacuum-Compatible

Datasheets & More Information on the M-660 Rotary Table:
http://www.physikinstrumente.com/en/news/fullnews.php?newsid=175

Low Inertia Ceramic Drive Improves Start/Stop Behavior and Speed Control
Mass and inertia were reduced significantly compared to conventional rotation stages, due to the light-weight direct-drive ceramic motor, operating without gears or magnets. The net result is very fast start/stop behavior, precise bidirectional speed and position control, which is critical for high speed motion contouring. These features make the M-660 outperform the stability, acceleration and settling speed of traditional servo motor direct drives and gear-driven mechanisms.

Software Support, Optimized Motion Controller
A special motion controller for piezo motors is available to take full advantage of the specific motion characteristics of ultrasonic ceramic motors. USB interfacing and a solid software and driver package (LabView, Matlab, etc) for seamless integration are included.

About PI

PI is a globally leading manufacturer of precision motion control equipment, piezo-mechanisms, nanopositioning systems, ceramic motors and actuators for photonics, life science, bio-nanotechnology, medical engineering, semiconductor and aerospace applications. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries, R&D / engineering on 3 continents and total staff of 600+.

PI USA designs and manufactures piezo products at the company’s US headquarters in Auburn, MA.

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