Micropositioning robot provides linear motion in X, Y, Z
The hexapod H-840.G2IHP micropositioning robot provides 6 degrees of freedom, step resolution of 20 nm, repeatability to ±0.1 µm, 40 kg load capacity, and travel ranges to 100 mm (linear) and 60°(rotation). Designed for multi-axis alignment and nanopositioning applications, it provides linear motion in X, Y, Z and rotations in Theta-X, Theta-Y, and Theta-Z.
PI (Physik Instrumente)
Auburn, MA