EUV light source features solid-state switching technology
The EQS-10 electrodeless z-pinch extreme-ultraviolet (EUV) light source delivers up to 4x the energy per pulse with an operating frequency up to 5 kHz. Designed with solid-state switching technology, pre-ionization control enhances z-pinch efficiency and enables tunability for various gases. Applications include EUV metrology, resist development, and defect inspection.
Energetiq
Wilmington, MA