Pulsed laser deposition tool enables films of 40% Sc and above

Pulsus is a pulsed laser deposition (PLD) tool designed for mass production.
May 18, 2024

Pulsus is a pulsed laser deposition (PLD) tool designed for mass production. It delivers uniform aluminum scandium nitride (AlScN) films to enable next-generation MEMS-based microphones and radio frequency (RF) filters for 5G and Wi-Fi 6. PLD technology enables films of 40% Sc and above.

Lam Research

Fremont, CA

www.lamresearch.com

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