Pulsed laser deposition tool enables films of 40% Sc and above

    May 18, 2024
    Pulsus is a pulsed laser deposition (PLD) tool designed for mass production.
    (Image credit: Lam Research)
    663921975dacf000093a580a Lam Research

    Pulsus is a pulsed laser deposition (PLD) tool designed for mass production. It delivers uniform aluminum scandium nitride (AlScN) films to enable next-generation MEMS-based microphones and radio frequency (RF) filters for 5G and Wi-Fi 6. PLD technology enables films of 40% Sc and above.

    Lam Research

    Fremont, CA

    www.lamresearch.com

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