Pulsed laser deposition tool enables films of 40% Sc and above
Pulsus is a pulsed laser deposition (PLD) tool designed for mass production. It delivers uniform aluminum scandium nitride (AlScN) films to enable next-generation MEMS-based microphones and radio frequency (RF) filters for 5G and Wi-Fi 6. PLD technology enables films of 40% Sc and above.
Lam Research
Fremont, CA