NYETORR 6300 Series PFPE Greases from FUCHS Lubricants Co. Advance Lubrication for Semiconductor Vacuum Environments
Low outgassing, highly inert PFPE formulations support motion control and minimize contamination
FUCHS Lubricants Co., the world’s largest independent lubricant manufacturer, highlights its NYETORR 6300 Series of low outgassing perfluoropolyether (PFPE) greases, engineered for the extreme vacuum and temperature demands of semiconductor manufacturing environments. The NYETORR 6300 Series is built around PTFE-thickened, heavy-viscosity PFPE base oils that are processed to deliver the lowest outgassing of any lubricant from FUCHS, helping reduce contamination risks in critical cleanroom and vacuum applications.
The NYETORR 6300 Series includes three specialized formulations: 5300, 6300, and 6300-FL. These are designed to give semiconductor equipment engineers targeted options for varying vacuum levels, temperature ranges, and motion control requirements. NYETORR 6300 is an NLGI grade 2 grease that undergoes additional processing to achieve exceptionally low outgassing performance, making it well suited for ultra-high vacuum systems where even minimal vapors can impact process stability and yield. NYETORR 6300-FL offers a more fluid-like consistency for precision motion applications where smooth, controlled movement is essential, while NYETORR 5300 utilizes ultrafiltered, low outgassing PFPE oils and a PTFE thickener to provide reliable lubrication in extreme environments.
This specialized grease family supports a wide range of sensitive semiconductor applications, including cleanroom robotics, wafer handling systems, vacuum chambers, bearings, gears, slides, and valves operating under high vacuum and high temperature conditions. Each formulation is highly inert and thermally stable, compatible with a broad range of materials, and designed to maintain consistent performance across wide temperature windows. Very low vapor pressure, low particle generation, and ultrafiltered base oils help minimize contamination pathways, supporting tighter process control and longer service intervals in advanced semiconductor tools.
By offering customized PFPE-based formulations tailored to different motion, contamination control, and mechanical stability requirements, the NYETORR 6300 Series enables engineers to match lubricant performance to specific tool designs and operating profiles. This family approach allows OEMs and fabs to standardize on a cohesive lubricant platform while still optimizing individual components for ultra-high vacuum environments, precision motion axes, and severe thermal or mechanical loads common in semiconductor manufacturing.
For additional information, visit https://www.fuchs.com/us/en/product/product/152163-NYETORR-6300/.
About FUCHS Lubricants Co.
Founded in 1931 as a family business in Mannheim, FUCHS is now the world's largest independent supplier of innovative lubrication solutions, covering almost every industry and application. Today, the company's 6,000 employees in over 50 countries still share the same goal: to keep the world moving both sustainably and efficiently. To live up to this claim, we think in terms of perfection, not merely standards. When developing individual solutions, we enter into an intensive customer dialogue – acting as an experienced consultant, innovative problem solver and reliable team partner.