Tiger Optics AMC analyzer uses cavity ring-down spectroscopy

The T-I Max platform is designed for continuous airborne molecular contamination monitoring.
Aug. 28, 2017
The T-I Max platform is designed for continuous airborne molecular contamination (AMC) monitoring for manufacturers using low-temperature epitaxy (LT-Epi). Each monitor measures a specific analyte, with no cross-contamination or interference from other chemicals in the air. Using cavity ring-down spectroscopy, it detects <1 ppb or lower of cleanroom contaminants HCI, HF, and NH3.

Tiger Optics

San Francisco, CA

www.tigeroptics.com

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