XUV calibration source from McPherson provides sample and reference comparison

Nov. 15, 2010
The Model 642-1 calibration light source for extreme ultraviolet (EUV) and soft x-ray (XUV) features a six-position anode carousel to exchange target materials.
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The Model 642-1 calibration light source for extreme ultraviolet (EUV) and soft x-ray (XUV) features a six-position anode carousel to exchange target materials. The user may select various emission wavelengths without breaking vacuum. Dual symmetrical output beams provide sample/reference comparison and device calibration in various test setups.
McPherson
Chelmsford, MA

[email protected]

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PRESS RELEASE

XUV Wavelength Calibration Source

McPherson’s Model 642-1 calibration light source for extreme ultraviolet (EUV) and soft x-ray (XUV) features a six position anode carousel to exchange target materials. It permits selecting various emission wavelengths without breaking vacuum. Dual symmetrical output beams provide sample/reference comparison and device calibration in various test set ups.

The Model 642-1 is a Manson type electron impact light source, and uses a hot filament to produce electrons subsequently accelerated towards a solid anode target by high voltage. The EUV and XUV output emission spectrum follows the target anode material valence band structure. Users can readily exchange anodes in the carousel in order to produce desired wavelengths, for example Ti (0.27nm), Si (0.71nm), Mg (0.98nm) and more. Many different anodes are characterized and available as accessories. This source is principally different from the exchangeable single-anode McPherson Model 642, and other sealed single wavelength x-ray tubes, because a selection of materials are installed in the evacuated housing at one time.

The vacuum housing of the source features standard CF flanges. Options include calibration branches, to mount pinholes, collimators, filters, and proportional counters or other standard detectors. The source is reasonably compact and controllable, output is debris free. Stable operation is attained with vacuum of 5 x 10E-5 torr or lower. The McPherson Model 642-1 is easy to set up and provides laboratories excellent, reliable means for at-wavelength calibration, or metrology of EUV lithography materials as well as multilayer or grazing incidence optical systems for astrophysics and other fundamental research.

McPherson, Inc. (Chelmsford, MA USA) manufactures a variety of instruments that measure and tune specific wavelengths of light for many disciplines of spectroscopy. The company delivers instrumentation to domestic and international laboratories for fundamental research in optics, physics, and chemistry. To learn more about our instruments and custom manufacturing capabilities, visit McPhersonInc.com or call 1-978-256-4512 today.

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