Piezoelectric nanopositioning stage from Piezosystem Jena positions mirrors or optics

July 19, 2012
The PX 100 CAP piezoelectric nanopositioning stage has a travel range of up to 100 μm of motion in closed loop mode.

The PX 100 CAP piezoelectric nanopositioning stage has a travel range of up to 100 μm of motion in closed loop mode. A built-in capacitive feedback sensor measures accuracy deviation with sub-nm precision and operates in direct metrology fashion. Measuring 40 × 40 × 20 mm, the stage is suited for positioning of small components, such as mirrors or optics.
Piezosystem Jena
Hopedale, MA

[email protected]

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Newly designed piezo-positioning stage with smaller dimensions and travel range extension!

piezosystem jena is pleased to present the newly advanced design of the PX 100 CAP piezo-electric nano positioning stage.

The travel range has been extended up to 100µm of motion in closed loop mode without compromising the stage’s excellent accuracy. For positioning control, a high resolution capacitive feedback sensor was built in. The sensor is able to measure a deviation of the accuracy with sub-nm accuracy, and operates in a direct metrology fashion.

A second key benefit of the redesigned PX 100 CAP stage is the total height. This value has been reduced by 9mm and the stage now has outside dimensions of only 40x40x20mm! The PX 100 CAP is now, more than ever, the appropriate tool for high precision positioning of small components, such as mirrors or other optical components. The outstanding accuracy also offers long term stability under changing conditions.


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