Actuators from Queensgate Instruments have position resolutions down to 0.09 nm

The Digital Piezo Translator series of actuators incorporate capacitive sensors for precise positioning and rapid settling. They have position resolutions down to 0.09 nm (RMS), < 2 ms response time, 0.5 nm (RMS) repeatability, closed-loop ranges from 20 to 110 μm, and move loads up to 60 kg across their entire range.
Queensgate Instruments
Cambridge, Cambridgeshire, England
www.nanopositioning.com