The Digital Piezo Translator series of actuators incorporate capacitive sensors for precise positioning and rapid settling. They have position resolutions down to 0.09 nm (RMS), < 2 ms response time, 0.5 nm (RMS) repeatability, closed-loop ranges from 20 to 110 μm, and move loads up to 60 kg across their entire range.
Queensgate Instruments
Cambridge, Cambridgeshire, England
www.nanopositioning.com