Direct-drive rotation stage provides 10-µrad calibrated accuracy
The V-625 direct-drive rotation stage combines frictionless, advanced direct-drive motor technology with a 100-mm clear aperture, 400-N load capacity, and 10-µrad calibrated accuracy for precision motion in metrology, semiconductor inspection, optics test and alignment, and industrial automation. An absolute encoder with 0.0015 µrad resolution is directly coupled to the rotating platform.
PI (Physik Instrumente)
Auburn, MA