XYZ piezo nanopositioning stage features capacitive feedback
The P-616 XYZ piezo nanopositioning stage, based on a parallel-kinematic design, features a single lightweight moving platform for all three axes. Known as the NanoCube, it features capacitive feedback, PICMA piezo actuators, and an E-727 digital servo piezo controller, providing a 100 µm linear travel range in three degrees of freedom.
PI (Physik Instrumente)
Auburn, MA