Nanopositioning stage suited for optics positioning
The noncontact, direct-drive A-361 PIglide air bearing XY-Theta-Z nanopositioning stage allows travel in X and Y directions ±2.5 mm, a rotation range of ±1°, load capacity to 3 kg, motion platform diameter of 200 mm, and overall height of 40 mm. It features an integrated vacuum chuck and is suited for wafer inspection, optics positioning, and clean room applications.
PI (Physik Instrumente)
Auburn, MA