V-855 and V-857 direct-drive linear modules can be operated as high load stages or linear actuators. Fully assembled and tested, they provide 0.1 µm minimum incremental motion, a cog-free 3-phase linear motor, speeds up to 5 m/sec., and acceleration up to 5g. Integrated optical linear position sensors measure to 1 nm increments.
PI (Physik Instrumente)
Auburn, MA
