Low-profile rotary stages provide resolution to 0.0015 µrad
The A-630 series includes A-634 and A-638 model direct-drive rotary stages with 150 and 350 mm table diameters, respectively. They measure 60 mm tall, provide speed to 3000 degrees/sec., resolution to 0.0015 µrad, and respective flatness and eccentricity of 175 and 300 nm. For transmitted light applications, the large-aperture A-688 model is available.
PI (Physik Instrumente)
Auburn, MA