Mini nanopositioning stage features an air bearing guide
The 27-mm-high A-142 nanopositioning and linear alignment stage delivers 10 mm of hysteresis-free linear travel and supports 3 kg loads. An air bearing guide allows straightness of 100 nm and flatness of 0.5 µm. An integrated voice-coil motor achieves maximum velocity of 450 mm/s and acceleration of 20 m/sec2.
PI (Physik Instrumente)
Auburn, MA