Small-batch optical coating from Power Vision uses magnetron sputtering process

Nov. 8, 2012
The PV Precision optical coating system coats small batches of substrates with rapid cycle time, coating six substrates up to 100 mm2 using a patented magnetron sputtering process.
Power Vision PV Precision optical coating system
Power Vision PV Precision optical coating system

The PV Precision optical coating system coats small batches of substrates with rapid cycle time, coating six substrates up to 100 mm2 using a patented magnetron sputtering process. It includes a vacuum load lock and two target materials, with an option for a third.
Power Vision
Cheshire, England

[email protected]



Small batch optical coating

The PV Precision is a new optical coating system targeting the requirement for coating small batches of substrates with fast cycle times. This affordable system is being introduced by UK-based Power Vision Ltd. The standard substrate carrier has six positions for mounting substrates in a vertical configuration. Special substrate tooling can be provided to maximize coating throughput and accommodate specific component types. The system incorporates a vacuum load lock for high throughput and low maintenance while maintaining vacuum conditions suitable for precise and high quality deposition. Door to door time to deposit a typical 9 layer BBAR is approx. 20 minutes.

The new system coats 6 substrates up to 100mm square. It uses a patented magnetron sputtering process to deposit premium quality coatings with exceptional density, adhesion and refractive index. In contrast to other small systems, the standard system is equipped with two target materials with the option for a 3 material configuration. Additionally the system uses a highly optimized plasma source to provide excellent in-situ plasma cleaning while also providing in-process ion bombardment. The standard system is optimized with a low temperature process, designed to coat temperature sensitive materials including CR39, Polycarbonate and PET. This process is also ideally suited to producing low stress coatings on a number of conventional substrates such as Glass, Silicon and metals. The system can be installed with an optional substrate heater, allowing for high temperature deposition up to 500°C and also a meissner trap for vapor critical processes. This makes the PV Precision versatile and suited for a number of applications such as anti-reflection coatings, transparent conducting oxides (TCO’s) color/IR filters, visible and thermal control coatings and thin films for photovoltaic applications.


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