Microelectronics industry optimizes operations with ultraviolet optics

Higher resolution and advantages in metrology have given ultraviolet optics a prominent role in microelectronics fabrication and other applications.

Apr 1st, 1995

Higher resolution and advantages in metrology have given ultraviolet optics a prominent role in microelectronics fabrication and other applications.

Diode-pumped Cr:LiSGAF produces 80-fs pulses

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