Precision scanner

A compact two-axis optical scanner can be used in situations where conventional galvo-mirror and polygon-mirror scanners cannot be used because of design limitations or power consumption. The planar coil and reflection mirror are fabricated on a moving silicon plate that measures a few square millimeters and scans a 䔮° range when driven with 40 mA of ac current.
March 1, 1999

Precision scanner

A compact two-axis optical scanner can be used in situations where conventional galvo-mirror and polygon-mirror scanners cannot be used because of design limitations or power consumption. The planar coil and reflection mirror are fabricated on a moving silicon plate that measures a few square millimeters and scans a 䔮° range when driven with 40 mA of ac current.

Nippon Signal Co. Ltd., Tokyo, Japan

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