Gigaphoton excimer laser targets 450 mm wafer production

April 3, 2013
The GT64A ArF excimer laser for scanners targeting 450 mm wafer production can achieve power levels of up to 120 W for multipatterning.

The GT64A ArF excimer laser for scanners targeting 450 mm wafer production can achieve power levels of up to 120 W for multipatterning. Power output can be automatically adjusted to optimal levels of light energy based on the process in use. It is designed for high overlay accuracy, critical dimension control, and minimization of line edge roughness.
Gigaphoton
Oyama, Japan

[email protected]

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PRESS RELEASE

Gigaphoton GIGAPHOTON’S LATEST GT64A ArF EXCIMER LASERS NOW AVAILABLE FOR ORDER TO SUPPORT 450MM WAFER & MULTI-PATTERNING LITHOGRAPHY

Offering the industry’s highest level power output of 120W, excellent performance and reliability, and eco-friendly design for minimizing operational cost

OYAMA, JAPAN — Gigaphoton, Inc., a major lithography light source manufacturer, announced today that its state-of-the-art GT64A ArF excimer lasers for scanners targeting 450mm wafer production are now available for order. The GT64A is the latest advancement in Gigaphoton’s continuously evolving ArF platform. The product inherits proven technologies from its predecessors such as the twin-chamber architecture, output control algorithm, beam alignment technologies, and advances them further to achieve greater output power, beam performance and stability – offering customers the industry’s highest level of reliability, recovery time, and module life.

The GT64A, with its extremely high laser efficiency, can achieve power levels of up to 120W for multi-patterning in 450mm wafer production applications. Power output can be automatically adjusted to optimal levels of light energy based on the customers’ process. With its highly stable energy, spectral bandwidth, and beam profile, combined with longer pulse durations, the product offers greatly improved overlay accuracy, critical dimension control, and minimization of line edge roughness – all of which are extremely important for multi-patterning lithography. Furthermore, the GT64A’s product concept weighed heavily on eco-friendliness to meet customer requirements for lowering electricity, gas, and cooling equipment costs to its lowest possible level.

“I am very pleased to be able to offer the GT64A―a product designed to support the highly anticipated 450mm wafer scanners”, said Hitoshi Tomaru, President and CEO of Gigaphoton. “This is yet another example of our long standing commitment to contribute products that meets the detailed needs of our customers and the semiconductor industry as a whole. We are committed to continuing our investments in the research and development of advanced lithography technologies and minimizing environmental impact through our EcoPhoton™ program, and EUV light sources.”

About Gigaphoton
Since its founding in 2000, Gigaphoton has developed and delivered user-friendly, high-performance DUV laser light sources used by major semi-conductor chipmakers in the Pan-Asian, US and European regions.

Gigaphoton's patented, innovative LPP EUV technology solutions lead the way to cost-effective, highly productive lithography sources for high-volume production. With a global business outlook, Gigaphoton strives to be the world’s number-one lithography light source provider, focusing on end-user needs in every phase of its business, from research and development to manufacturing to best-in-class reliability and world-class customer support. Visit http://www.gigaphoton.com

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