Manufactures integrated metrology for thin-film deposition processes in a broad range of applications like optoelectronics, electronics, PV, displays, optics, photonics, SEMI and flash memory production.
Measures real wafer surface temperature during GaN buffer and multiple quantum well (MQW) growth, is an ideal tool for growth optimization and temperature control in LED and laser...
Measurements of wafer curvature, emissivity corrected wafer temperature, growth rate, film composition and surface morphology even on double-side polished and patterned substrates...
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