Rudolph Technologies Inc

16 Jonspin Rd
Wilmington, MA 01887
United States
978-253-6200
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More Info on Rudolph Technologies Inc

Designs and manufactures precision electro-optical instrumentation for transparent and opaque (metal) film metrology.

Products

Advanced equipment control provides an open, fully-integrated, object-oriented development environment enabling portability.
High performance advanced defect classification supports all SEM and optical inspection tools.
Sort and defect spatial pattern recognition software analyzes defect density and highlights specific signatures.
Collects and analyzes data to detect and prohibit scrap-generating events and reduce consumables
Build on the foundation of the NSX Series of advanced packaging defect inspection products, the NSX 320 System is specifically optimized for TSV processes, including 2D/3D metrology...
The industry-leading product for run-to-run advanced process control. Controls to target etch, litho, CD, deposition and CMP processes.
Equipment automation software that easily integrates with existing factory systems.
A widely used inline defect analysis and data management system.
Focused Beam Ellipsometry transparent film metrology systems
Production-worthy, on-product opaque film measurement

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Additional content from Rudolph Technologies Inc

The Explorer Cluster allows individual systems to be configured with any combination of wafer front, back, and edge inspection modules allowing the user to mix and match inspection...
Automated macro defect inspection system using gray-scale image analysis with color image capture to provide fast, accurate inspection and metrology in LED manufacturing applications...