Inspection Equipment For Glass Wafers (NOVA-2000-G) is made for finding defects in transparent or semi-transparent wafer substrates, like glass and lithium niobate wafers. It can spot defects such as particles, scratches, pits, bumps, chipped edges, and cracks. This is important for controlling the quality of transparent wafers.

The system uses different detection methods, like bright field and dark field.

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