• SST 3150 High Vacuum Furnace

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    June 9, 2021
    Sst 3150 Left Side 1 60c11e8a85a0b

    The SST 3150 is designed to create high reliability MEMS packages. Packages are hermetically sealed with very low vacuum and moisture levels for extended, long-term performance. The 3150 provides vacuum levels as low as 10-7 Torr, and temperatures up to 500°C (1000°C optional). The system may also be configured to allow for in situ separation of lid and package, getter firing and sealing of MEMS packages. 

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