Advanced nanopositioning mechanisms and control algorithms are central to performance improvements in laser and silicon photonics (SiP) applications. The paper reviews various drive and bearing technologies — including air bearings, flexure guides, and serial and parallel kinematics setups — highlighting their benefits and limitations in achieving nanometer-level precision and high-throughput performance. It also emphasizes their role in improving accuracy and efficiency in the testing and production of silicon photonics and semiconductor devices.
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