Advancing Photonics Alignment and Laser Processing with Precision Motion Control
Advanced nanopositioning mechanisms and control algorithms are central to performance improvements in laser and silicon photonics (SiP) applications. The paper reviews various drive and bearing technologies — including air bearings, flexure guides, and serial and parallel kinematics setups — highlighting their benefits and limitations in achieving nanometer-level precision and high-throughput performance. It also emphasizes their role in improving accuracy and efficiency in the testing and production of silicon photonics and semiconductor devices.
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