This paper focuses on the advantages of air bearing motion systems in photonics alignment and laser wafer slicing. Air bearings offer significant benefits in terms of precision, longevity, and vibration control, making them ideal for these applications. The paper discusses different designs and their benefits and limitations in achieving nanometer-level precision and high-speed performance. It highlights their contribution to enhancing the accuracy and efficiency in the test and production of silicon photonics and semiconductors.
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