Irvine, CA, March 22, 2004--Newport Corporation has booked three separate orders for semiconductor capital equipment subsystems that total more than $6 million. The first system, purchased by a leading semiconductor equipment manufacturer, is a precision motion platform that will be incorporated into a laser-based processing tool. The system utilizes the advanced motion control technology of Newport's DynamYX wafer-positioning stages to deliver movement in multiple axes. Newport is scheduled to begin shipment on this order in the second quarter of 2004, with completion by August 31.
The other two orders, both placed by a major producer of semiconductor metrology tools, are for integrated opto-mechanical subassemblies. One forms part of an in-line wafer inspection system and the other is incorporated into a reticle metrology tool. Each of the Newport subassemblies comprise high performance laser optics, manufactured using the company's magnetorheological finishing technology and precision optical mounts. These orders also commence in the second quarter of 2004, with scheduled completion by September 30.