The ZPS absolute position measurement system enables high-precision measurement and positional control for applications such as deformable optics, lens positioning systems, and fine stage control. It provides non-contact absolute position on up to 64 synchronized channels, with resolution of 0.01 nm with >1 nm/day measurement stability over a range of 1.2 mm.
Zygo
Middlefield, CT
www.zygo.com