Veeco's confocal microscopes characterize samples in 3D

June 23, 2010

VCM confocal metrology 3D microscopes perform noncontact three-dimensional sample characterization at submicrometer lateral resolution and nanometer vertical resolution.

VCM confocal metrology 3D microscopes perform noncontact three-dimensional sample characterization at submicrometer lateral resolution and nanometer vertical resolution. They allow analysis of high-curvature or steep-slope samples and measurement beneath transparent media or at all levels of engineered semi-transparent films. Models range from manual benchtop units to automated production systems handling samples from 150 to 300 mm.
Veeco
Plainview, NY
www.veeco.com/confocal

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PRESS RELEASE

The new Veeco Confocal Metrology (VCM) 3D Microscopes combine the latest in confocal technology and nanometer-scale height measurements with the ease-of-use of a conventional microscope. With their ability to perform fast, non-contact three-dimensional sample characterization at submicrometer lateral resolution and nanometer vertical resolution, VCM 3D Confocal Microscopes provide an ideal solution for analyzing high-curvature or steep-slope samples, as well as for measuring beneath transparent media or at all levels of engineered semi-transparent films. The systems are available in a range of scalable models, from manual bench-top units to automated production worthy systems handling samples from 150mm to 300mm. For more information, see www.veeco.com/confocal.