Laser sensor

May 8, 2000
A lightweight, flexible, noncontact laser nanosensor uses autofocus principles and has a resolution down to 5 nm ...

A lightweight, flexible, noncontact laser nanosensor uses autofocus principles and has a resolution down to 5 nm and a frequency response rate and measurement speed up to 300 kHz. The nanosensor has a measuring range from 8.8 to 300 µm, depending on model, with an accuracy <0.5% of the measuring range.
LMI Selcom, Southfield, MI

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