Surfacemeasurement system

    Aug. 1, 1994
    The RST Plus rapidly measures the surface texture of a wide variety of materials, such as plastics, ceramic, and silicon. The system features rapid threedimensional analysis of areas, high resolution, a variable field of view, a wide measurement range, and an objective turret. The system provides quantitative surfaceheight measurements from 0.1 nm u¥to 500 µm.

    The RST Plus rapidly measures the surface texture of a wide variety of materials, such as plastics, ceramic, and silicon. The system features rapid threedimensional analysis of areas, high resolution, a variable field of view, a wide measurement range, and an objective turret. The system provides quantitative surfaceheight measurements from 0.1 nm u¥to 500 µm.

    ColorCCD area sensors

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