The LZR3000 laser interferometer system measures, calibrates, and provides position feedback for applications that require resolution u¥to 0.6 nm and accu racy from 10 ppm (uncompensated) to 0.1 ppm (in vacuum). The system increases workpiece speeds u¥to 1 m/s over a 10m range with submicron resolution to increase productivity in manufacturing applications. The LZR3000 consists of a compact, frequencystabilized HeNe laser head, PCbased twochannel processor board with a Windowsbased software interface, linear interferometer and reflectometer modules, and all the required cables. There are optional environmental and material temperature sensor subsystems available to further enhance stability. The LZR3000 is suited for openloo¥measurement applications such as machinetool calibration as well as closedloo¥motioncontrol positioning applications such as integrated circuit manufacture and test, optics fabrication, and laser machining.