Miniature laser interferometer

The Model HC250 is a noncontact Michelson dual interferometer that has a 780nm laser diode and dual photodetector integrated with an opticalcircuit etched onto silicon. These components fit inside a 17mmdiameter cylinder that is 73 mm long. Resolution is 0.1 µm with analog outputs and 0.01 µm with digital outputs across a 500mm measurement range. The unit measures distances to moving targets with the maximum speed of 200 mm/s.

The Model HC250 is a noncontact Michelson dual interferometer that has a 780nm laser diode and dual photodetector integrated with an opticalcircuit etched onto silicon. These components fit inside a 17mmdiameter cylinder that is 73 mm long. Resolution is 0.1 µm with analog outputs and 0.01 µm with digital outputs across a 500mm measurement range. The unit measures distances to moving targets with the maximum speed of 200 mm/s.

Tunable imaging filter

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