Interferometer

The ZMI 2000 Displacement Measuring Interferometer provides 0.3-nm linear resolution at velocities u¥to 2.1 m/s. The instrument can synchronize 12 axes of motion with a total data age uncertainty between the axes of less than 1 ns. The VMEbus-based machine includes on-board fiber receivers for both the measurement and reference signals. This provides added resistance to electrostatic discharge by isolating the measurement electronics from the user`s motion system.
March 1, 1997

Interferometer

The ZMI 2000 Displacement Measuring Interferometer provides 0.3-nm linear resolution at velocities u¥to 2.1 m/s. The instrument can synchronize 12 axes of motion with a total data age uncertainty between the axes of less than 1 ns. The VMEbus-based machine includes on-board fiber receivers for both the measurement and reference signals. This provides added resistance to electrostatic discharge by isolating the measurement electronics from the user`s motion system.

Zygo, Middlefield, CT

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