Mini interferometer

The PODS 0-16 is a fiber-pigtailed miniature interferometer that can measure displacement over a 16-cm range to 0.3-nm accuracy. With a 7-MH¥output bandwidth, the device is also suited for vibration and velocity measurements. A single HeNe laser can power u¥to four PODS sensor heads. The interferometer comes with a laser source, signal-processing electronics, and customizable GUI-based software. Applications include biotechnology, semiconductor manufacturing, and precision positioning.

Feb 1st, 1997

Mini interferometer

The PODS 0-16 is a fiber-pigtailed miniature interferometer that can measure displacement over a 16-cm range to 0.3-nm accuracy. With a 7-MH¥output bandwidth, the device is also suited for vibration and velocity measurements. A single HeNe laser can power u¥to four PODS sensor heads. The interferometer comes with a laser source, signal-processing electronics, and customizable GUI-based software. Applications include biotechnology, semiconductor manufacturing, and precision positioning.

MPB Technologies, Pointe Claire, Que., Canada

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