Surface measurement system
A noncontact rapid-integration metrology system measures surface position with spatial resolutions on the order of 220 nm and displacement measurements as small as 1.0 nm. A 670-nm diode laser illuminates the partially reflecting surface, and the reflected spot is detected by superlinear position photodetectors. The sensors can be provided for a variety of ranges from 1.0 cm (capable of 1-nm displacement) to 2.5 m (capable of measuring 6-µm displacement).
Opmetec Co., Tucson, AZ