Film metrology system

The Vanguard SpectraLASER 200 XL system uses lasers at 458, 633, 780, and 905 nm plus a deep-UV reflectometer to measure thickness, refractive index, and other properties of thick and thin transparent films. The system also offers characterization of AR coatings and back AR coatings at the UV-lithography exposure wavelengths of 365, 248, and 193 nm.

Sep 1st, 1997

Film metrology system

The Vanguard SpectraLASER 200 XL system uses lasers at 458, 633, 780, and 905 nm plus a deep-UV reflectometer to measure thickness, refractive index, and other properties of thick and thin transparent films. The system also offers characterization of AR coatings and back AR coatings at the UV-lithography exposure wavelengths of 365, 248, and 193 nm.

Rudolph Technologies, Flanders, NJ

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