Deep-UV laser

An all-solid-state deep-UV laser produces ultranarrow (below 20 fm) spectral bandwidths output at 193 and 248 nm and is tunable to other wavelengths. The laser has single-longitudinal-mode operation with wavelength and frequency stability and precision. It is designed for use in interferometry, photolithography, holography, spectroscopy, metrology, writing fiber gratings, and photoresist testing.
Oct. 1, 1998

Deep-UV laser

An all-solid-state deep-UV laser produces ultranarrow (below 20 fm) spectral bandwidths output at 193 and 248 nm and is tunable to other wavelengths. The laser has single-longitudinal-mode operation with wavelength and frequency stability and precision. It is designed for use in interferometry, photolithography, holography, spectroscopy, metrology, writing fiber gratings, and photoresist testing.

Light Age, Somerset, NJ

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