Thermometry platform integrates five channels

    Aug. 19, 2023
    The Luxtron M-1100 FluorOptic thermometry platform is suited for plasma-enhanced semiconductor deposition and etch fabrication processes.
    Advanced Energy 64c01fe47bce4

    Suited for plasma-enhanced semiconductor deposition and etch fabrication processes, the Luxtron M-1100 FluorOptic thermometry platform operates from -200°C, the start of the cryogenic range, to “hot chuck” temperatures of 450°C with accuracy of ±0.1°C and stability of ±0.05°C. The integration of five channels supports monitoring of multiple probes from a single converter.

    Advanced Energy

    Denver, CO

    www.advancedenergy.com

    GET PRICING

    Continue Reading

    Sponsored Recommendations

    March 31, 2025
    Enhance your remote sensing capabilities with Chroma's precision-engineered optical filters, designed for applications such as environmental monitoring, geospatial mapping, and...
    March 31, 2025
    Designed for compatibility with a wide range of systems, Chroma's UV filters are engineered to feature high transmission, superior out-of-band blocking, steep edge transitions...
    March 31, 2025
    Discover strategies to balance component performance and system design, reducing development time and costs while maximizing efficiency.
    March 31, 2025
    Filter accessories including cubes, sliders, and rings, designed to enhance the performance and versatility of optical systems. These components ensure precise alignment and stability...

    Voice your opinion!

    To join the conversation, and become an exclusive member of Laser Focus World, create an account today!