Thermometry platform integrates five channels

    Aug. 19, 2023
    The Luxtron M-1100 FluorOptic thermometry platform is suited for plasma-enhanced semiconductor deposition and etch fabrication processes.
    Advanced Energy 64c01fe47bce4

    Suited for plasma-enhanced semiconductor deposition and etch fabrication processes, the Luxtron M-1100 FluorOptic thermometry platform operates from -200°C, the start of the cryogenic range, to “hot chuck” temperatures of 450°C with accuracy of ±0.1°C and stability of ±0.05°C. The integration of five channels supports monitoring of multiple probes from a single converter.

    Advanced Energy

    Denver, CO

    www.advancedenergy.com

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